300-mm monolithic CMOS silicon photonics foundry technology

Yusheng Bian
ECSE Topical Seminar
DCC 318
Wed, November 29, 2023 at 4:00 PM

The ever-burgeoning bandwidth requirements for data center infrastructure are intensifying the necessity for optical transceivers to provide faster connectivity solutions at volume scales and cost structure surpassing 100G/l. Optical interconnect utilizing monolithic silicon photonics (SiPh) technology, which enables the large-scale fabrication of state-of-the art photonics and CMOS devices on the same silicon-on-insulator substrate, plays a pivotal role in addressing the scalability, energy consumption and cost efficiency of existing interconnection schemes. This talk will provide an overview of GlobalFoundries FotonixTM platform - the world’s first high-volume 300mm monolithic CMOS SiPh foundry offering. The presentation will cover key challenges and recent advancements in low-loss passive SiPh components such as Si and SiN waveguides, couplers, multi-mode interferometers, polarization splitters and rotators, wavelength division multiplexers, and high-performance active devices like Mach-Zehnder modulators, micro-ring modulators, germanium photodetectors and undercut thermal phase shifters. Additionally, it will spotlight the achievements in advanced packaging features including passive V-groove fiber attach, laser attach, Cu pillar and TSV. The presentation will also touch on high-performance RF SOI CMOS, encompassing analog mixed signal devices, digital standard cell libraries as well as best-in-class TIA and drivers. The talk will conclude with a glimpse into GlobalFoundries’ SiPh roadmap aimed at fueling research and innovation to address the growing market demands across various domains beyond data centers. 

Yusheng Bian

Dr. Yusheng Bian is a Principal Member of Technical Staff with GlobalFoundries, Malta, NY, where he serves as the technical lead for the research and development of optical I/O and passive silicon photonic components. He has made significant contributions to the development and qualification of the GlobalFoundries FotonixTM platform including CMS90WG and 45SPCLO. Dr. Bian has authored more than 130 technical publications and two book chapters. He holds more than 200 granted patents worldwide and has more than 260 pending patent applications. Dr. Bian was the recipient of numerous recognitions and awards, including SRC Mahboob Khan Outstanding Liaison Award, GlobalFoundries Master Inventor, GlobalFoundries Inaugural GFX Prize Winner, GlobalFoundries Double Diamond Inventor Achievement Level Award, GlobalFoundries Inaugural Diversity in Inventorship Champion Award, GlobalFoundries CEO Award, and USPTO Appreciation Award. Dr. Bian received the Ph.D. degree in Optical Engineering from Beijing University of Aeronautics and Astronautics, Beijing, China. Prior to joining GlobalFoundries, he was a Postdoctoral Scholar with Pennsylvania State University, USA, and Peking University, Beijing, China.